Synthesis of YMnO3 thin films from alkoxy-derived precursors

Ferroelectrics

Volumn 263, Issue 1, 2001, Pages 285-290

  Suzuki, Kazuyuki ^a   Nishizawa, Kaori ^a   Miki, Takeshi ^a   Kato, Kazumi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

alkoxy derived precursor; chemical solution deposition; crystallization behavior; heat treatment in vacuum; surface morphology; YMnO3 thin film

Indexed keywords

ALKOXY-DERIVED PRECURSOR; C SUBSTRATES; C-AXIS ORIENTATIONS; CHEMICAL SOLUTION DEPOSITION; CRYSTALLIZATION BEHAVIOR; IN-VACUUM; ISO-PROPOXIDE; MONOMETHYL ETHERS; PHASE PURITY; PRECURSOR SOLUTIONS; SMOOTH SURFACE; YMNO3 THIN FILM;

CHEMICALS; CRYSTALLIZATION; ETHERS; ETHYLENE; ETHYLENE GLYCOL; MANGANESE; MORPHOLOGY; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SUBSTRATES; SURFACE MORPHOLOGY; SYNTHESIS (CHEMICAL); THIN FILMS; VACUUM; VAPOR DEPOSITION; YTTRIUM; YTTRIUM ALLOYS;

FILM PREPARATION;

EID: 0344322568     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190108225213     Document Type: Conference Paper

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