Five-contact silicon structure based integrated 3D Hall sensor

Electronics Letters

Volumn 39, Issue 23, 2003, Pages 1646-1648

  Roumenin, Ch S ^a   Nikolov, D I ^a  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); ELECTRIC CURRENTS; HALL EFFECT; MAGNETIC FIELD MEASUREMENT; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; THREE DIMENSIONAL;

CHANNEL MAGNETOSENSITIVITIES; HALL SENSOR; MAGNETIC FIELD VECTOR;

SILICON SENSORS;

EID: 0344118689     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20031075     Document Type: Article

References (8)

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2. Kordic, S., and Munter, J.A.: 'Three-dimensional magnetic-field sensors', IEEE Trans. Electron Devices, 1988, 35, (6), pp. 771-779
3. Paranjape, M., Filanovsky, I., and Ristic, L.J.: 'A 3-D vertical Hall magnetic-field sensor in CMOS technology', Sens. Actuators, 1992, A34, pp. 9-14
4. Yilmazoglu, O., et al.: 'Integrated InAs/GaSb 3D magnetic field sensors for the intelligent tire', Sens. Actuators, 2001, A94, pp. 59-63
5. Schott, Ch., and Popovic, R.S.: 'Integrated 3-D Hall magnetic field sensor', Proc. Transducers '99, 1999, 1, pp. 168-171
6. Roumenin, Ch.S., Nikolov, D., and Ivanov, A.: 'Enhancing the sensitivity of Hall microsensor by minority carrier injection', Electron. Lett., 2000, 36, (16), pp. 1375-1376
7. Roumenin, Ch.S., Dimitrov, K., and Ivanov, A.: 'Integrated vector sensor and magnetic compass using a novel 3D Hall structure', Sens. Actuators, 2001, A92, pp. 119-122
8. Roumenin, Ch.S., and Kostov, P.T.: 'Hall effect sensor'. Patent Bulgarian 372081983