1.5-kW high peak power and 140-ns short-pulse krypton excimer lamp using a pulsed silent discharge

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3574, Issue , 1998, Pages 466-469

  Kawanaka, Junji ^a   Shirai, Takahiro ^a   Kubodera, Shoichi ^a   Sasaki, Wataru ^a  

^a UNIVERSITY OF MIYAZAKI   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL LASERS; EXCIMER LASERS; FLOW OF GASES;

DESTRUCTIVE PROCESS; EXCIMER LAMPS; HIGH PEAK POWER; PENNING IONIZATION; RARE-GAS EXCIMER LASERS; SHORT PULSE; SILENT DISCHARGE; SPECTRAL REGION;

ULTRASHORT PULSES;

EID: 0343855885     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.334473     Document Type: Conference Paper

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