SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 318, Issue 1-2, 1998, Pages 29-32

STM study on silicon(001) grown by magnetron sputter epitaxy

(3) Vögeli, Bernhard a Zimmermann, Samuel a Von Känel, Hans a

a ETH ZURICH (Switzerland)

Author keywords

Homoepitaxy; Magnetron sputter epitaxy; Silicon

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL DEFECTS; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; MOLECULAR DYNAMICS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR GROWTH; SUBSTRATES;

MAGNETRON SPUTTER EPITAXY (MSE);

SEMICONDUCTING SILICON;

EID: 0343348380 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)01134-6 Document Type: Article

Times cited : (5)

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