High-speed surface measurement using a nonscanning multiple-beam confocal microscope

Optical Engineering

Volumn 38, Issue 6, 1999, Pages 1035-1040

  Ishihara, Mitsuhiro ^a   Sasaki, Hiromi ^a  

^a R and D Center   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; IMAGING SYSTEMS; SCANNING; SURFACE MEASUREMENT;

CONFOCAL OPTICS; PROFILOMETRY;

MICROSCOPES;

EID: 0032686247     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602155     Document Type: Article

References (11)

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