Investigation of beam effect on porous silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161, Issue , 2000, Pages 260-263

  Kotai E ^a   Paszti F ^a   Szilagyi E ^a  

^a WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; POROSITY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS;

BEAM EFFECT; CHANNELING;

POROUS SILICON;

EID: 0343192407     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00853-8     Document Type: Article

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