TiNi (Shape Memory) Films on Silicon for MEMS Applications

Journal of Microelectromechanical Systems

Volumn 4, Issue 4, 1995, Pages 206-212

  Wolf, Richard H ^a   Heuer, Arthur H ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; NICKEL ALLOYS; PHASE TRANSITIONS; RESIDUAL STRESSES; SEMICONDUCTING SILICON; SHAPE MEMORY EFFECT; THERMAL EFFECTS;

MICROACTUATION; MICROFABRICATION; POLYSILICON SURFACES; SHAPE MEMORY FILMS; WORK DENSITY;

METALLIC FILMS;

EID: 0029429844     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.475547     Document Type: Article

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