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Volumn 38, Issue 2, 1999, Pages 368-380

Near-infrared bandpass filters from Si/SiO2 multilayer coatings

Author keywords

Fabry P rot; Films; Filters; Refractive index

Indexed keywords


EID: 0343179553     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602098     Document Type: Article
Times cited : (37)

References (25)
  • 1
    • 0346148933 scopus 로고
    • High stability optical filters for space optics: Applications to Silex programme
    • Space Optics 1994, Space Instrumentation and Spacecraft Optics. T. M. Denowndre, J. J. Schulte-in-Den-Baurmen, and E. Sein, Eds.
    • P. Davi, "High stability optical filters for space optics: applications to Silex programme," in Space Optics 1994, Space Instrumentation and Spacecraft Optics. T. M. Denowndre, J. J. Schulte-in-Den-Baurmen, and E. Sein, Eds., Proc. SPIE 2210, 498-505 (1994).
    • (1994) Proc. SPIE , vol.2210 , pp. 498-505
    • Davi, P.1
  • 2
    • 85076596661 scopus 로고
    • High performance infrared filters for the HIRDLS 21-channel focal plane detector array
    • Space Optics 1994, Earth Observation and Astronomy, G. Cerutti-Maori and P. Roussel, Eds.
    • R. Hunneman, J. J. Barnett, and G. J. Hawkins, "High performance infrared filters for the HIRDLS 21-channel focal plane detector array," Space Optics 1994, Earth Observation and Astronomy, G. Cerutti-Maori and P. Roussel, Eds., Proc. SPIE 2210, 225-235 (1994).
    • (1994) Proc. SPIE , vol.2210 , pp. 225-235
    • Hunneman, R.1    Barnett, J.J.2    Hawkins, G.J.3
  • 3
    • 0041288417 scopus 로고
    • Design and fabrication of infrared filters for remote sensing instrumentation
    • Space Optics 1994, Earth Observation and Astronomy, G. Cerutti-Maori and P. Roussel, Eds.
    • J. Hawkins and R. Hunnemann, "Design and fabrication of infrared filters for remote sensing instrumentation," in Space Optics 1994, Earth Observation and Astronomy, G. Cerutti-Maori and P. Roussel, Eds., Proc. SPIE 2210, 639-651 (1994).
    • (1994) Proc. SPIE , vol.2210 , pp. 639-651
    • Hawkins, J.1    Hunnemann, R.2
  • 4
    • 0346148930 scopus 로고
    • High performance multilayer interference filters for the region 12-50 μm
    • C. S. Evans, R. Hunneman, and J. S. Seeley, "High performance multilayer interference filters for the region 12-50 μm," J. Phys. D 9, 309-320 (1976).
    • (1976) J. Phys. D , vol.9 , pp. 309-320
    • Evans, C.S.1    Hunneman, R.2    Seeley, J.S.3
  • 5
    • 0038388723 scopus 로고
    • Design of multilayer filters by considering two effective interfaces
    • S. D. Smith, "Design of multilayer filters by considering two effective interfaces," J. Opt. Soc. Am. 48(1), 43-50 (1958).
    • (1958) J. Opt. Soc. Am. , vol.48 , Issue.1 , pp. 43-50
    • Smith, S.D.1
  • 6
    • 0348040581 scopus 로고
    • Design optimization of optical filters for space applications
    • M. N. Annapurna, C. L. Nagendra, and G. K. M. Thutupalli, "Design optimization of optical filters for space applications," Proc. SPIE 1485, 260-272 (1991).
    • (1991) Proc. SPIE , vol.1485 , pp. 260-272
    • Annapurna, M.N.1    Nagendra, C.L.2    Thutupalli, G.K.M.3
  • 7
    • 0017006297 scopus 로고
    • New materials for optical thin films
    • F. Setter, R. Esselborn, M. Frizona, and P. Folles, "New materials for optical thin films," Appl. Opt. 15(10), 2315-2317 (1976).
    • (1976) Appl. Opt. , vol.15 , Issue.10 , pp. 2315-2317
    • Setter, F.1    Esselborn, R.2    Frizona, M.3    Folles, P.4
  • 9
    • 0348040582 scopus 로고
    • Software Spectra, Inc., Orlando, FL
    • TFCALC 3.0, Thin film software, Software Spectra, Inc., Orlando, FL (1991).
    • (1991) TFCALC 3.0, Thin Film Software
  • 12
    • 0018482115 scopus 로고
    • Characterization of optical thin films
    • H. K. Pulker, "Characterization of optical thin films," Appl. Opt. 18(12), 1969-1977 (1979).
    • (1979) Appl. Opt. , vol.18 , Issue.12 , pp. 1969-1977
    • Pulker, H.K.1
  • 13
    • 0015673667 scopus 로고
    • Increase of refractive index of silicon films by dangling bonds
    • E. Schwidefsky, "Increase of refractive index of silicon films by dangling bonds," Thin Solid Films 18, 45-52 (1973).
    • (1973) Thin Solid Films , vol.18 , pp. 45-52
    • Schwidefsky, E.1
  • 14
    • 0348040579 scopus 로고
    • The optical properties of amorphous and crystalline silicon
    • G. K. M. Thutupalli and S. G. Tomlin, "The optical properties of amorphous and crystalline silicon," J. Phys. C 10, 467-477 (1977).
    • (1977) J. Phys. C , vol.10 , pp. 467-477
    • Thutupalli, G.K.M.1    Tomlin, S.G.2
  • 15
    • 84975594924 scopus 로고
    • 2 thin film mirrors and antireflection coatings
    • 2 thin film mirrors and antireflection coatings," Appl. Opt. 29(4), 583-588 (1990).
    • (1990) Appl. Opt. , vol.29 , Issue.4 , pp. 583-588
    • Stone, J.1    Stulz, L.W.2
  • 16
    • 0032072303 scopus 로고
    • Optical properties and surface morphology of near infrared antireflection coatings
    • H. Ganesh Shanbhogue, S. N. Prasad, C. L. Nagendra, and G. K. M. Thutupalli, "Optical properties and surface morphology of near infrared antireflection coatings," Thin Solid Films 320, 290-297 (1989).
    • (1989) Thin Solid Films , vol.320 , pp. 290-297
    • Ganesh Shanbhogue, H.1    Prasad, S.N.2    Nagendra, C.L.3    Thutupalli, G.K.M.4
  • 17
    • 0346779214 scopus 로고
    • Optical properties of infrared (IR) materials in IR region
    • C. L. Nagendra and G. K. M. Thutupalli, "Optical properties of infrared (IR) materials in IR region," J. Spacecraft Technol. 2, 7-17 (1992).
    • (1992) J. Spacecraft Technol. , vol.2 , pp. 7-17
    • Nagendra, C.L.1    Thutupalli, G.K.M.2
  • 18
    • 0014380721 scopus 로고
    • Formulae relating to optical reflection and transmission by thin films
    • S. G. Tomlin, "Formulae relating to optical reflection and transmission by thin films," Br. J. Appl. Phys., J. Phys. D 1, 1667-1671 (1968).
    • (1968) Br. J. Appl. Phys., J. Phys. D , vol.1 , pp. 1667-1671
    • Tomlin, S.G.1
  • 19
    • 0019541989 scopus 로고
    • Optical constants of absorbing films
    • C. L. Nagendra and G. K. M. Thutupalli, "Optical constants of absorbing films," Vacuum 31(3), 141-145 (1981).
    • (1981) Vacuum , vol.31 , Issue.3 , pp. 141-145
    • Nagendra, C.L.1    Thutupalli, G.K.M.2
  • 20
    • 0037654919 scopus 로고
    • Determination of the optical constants of weakly absorbing thin films
    • A. S. Valeev, "Determination of the optical constants of weakly absorbing thin films," Opt. Spectrosc. 15, 269-274 (1963).
    • (1963) Opt. Spectrosc. , vol.15 , pp. 269-274
    • Valeev, A.S.1
  • 22
    • 0005242457 scopus 로고
    • Overview of wafer cleaning technology
    • Chap. 1 W. Kern, Ed., Noyes, NJ
    • W. Kern, "Overview of wafer cleaning technology," Chap. 1 in Hand Book of Semiconductor wafer cleaning technology, W. Kern, Ed., pp. 19-21, Noyes, NJ (1993).
    • (1993) Hand Book of Semiconductor Wafer Cleaning Technology , pp. 19-21
    • Kern, W.1
  • 23
    • 0348040580 scopus 로고
    • Band pass filters
    • Chap. 7, Adam Hilger Ltd., London
    • H. A. Macleod, "Band pass filters," Chap. 7, in Thin Film Optical Filters, Adam Hilger Ltd., London (1969).
    • (1969) Thin Film Optical Filters
    • Macleod, H.A.1
  • 24
    • 6144250894 scopus 로고    scopus 로고
    • Temperature-stable band pass filters deposited with plasma ion-assisted deposition
    • A. Zoller, R. Gotzelmann, K. Matl, and D. Cushing, "Temperature-stable band pass filters deposited with plasma ion-assisted deposition," Appl. Opt. 35(28), 5609-5612 (1996).
    • (1996) Appl. Opt. , vol.35 , Issue.28 , pp. 5609-5612
    • Zoller, A.1    Gotzelmann, R.2    Matl, K.3    Cushing, D.4
  • 25
    • 0028745818 scopus 로고
    • Stable ultra narrow band pass filters
    • Optical Thin Films IV: New Developments, James D. Rancourt, Ed.
    • M. A. Scobey and P. D. Stupik, "Stable ultra narrow band pass filters," in Optical Thin Films IV: New Developments, James D. Rancourt, Ed., Proc. SPIE 2262, 37-46 (1994).
    • (1994) Proc. SPIE , vol.2262 , pp. 37-46
    • Scobey, M.A.1    Stupik, P.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.