Plasma-assisted chemical vapor deposition growth of SiC on Si(100): Morphology and electronic structure

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1599-1603

  Bittencourt, C ^a   De Seta, M ^a   Evangelisti, F ^a  

^a ROMA TRE UNIVERSITY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343048013     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589946     Document Type: Article

References (13)

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