Study of carbon nitride films deposited using a Hall-type ion source

Journal of Physics D: Applied Physics

Volumn 33, Issue 19, 2000, Pages 2373-2378

  Bacal, M ^a   Perriere J ^b   Tanguy, M ^a   Vesselovzorov, A N ^c   Maslakov I, K ^c   Dementjev, A P ^c  

^a ECOLE POLYTECHNIQUE   (France)

^b UNIVERSITÉ PARIS DESCARTES   (France)

^c KURCHATOV INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON INORGANIC COMPOUNDS; GRAPHITE; HALL EFFECT; ION BEAMS; ION SOURCES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON WAFERS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS;

CONDUCTIVE FILMS;

EID: 0343006707     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/19/305     Document Type: Article

References (11)

1. Liu A Y and Cohen M L 1990 Phys. Rev. B 41 10 727
2. Fujimoto F and Ogata K 1993 Japan. J. Appl. Phys. 32 L420
3. Diani M, Mansour A, Kubler L, Bischoff J L and Bolmont D 1994 Diam. Relat. Mater. 3 264
4. Boyd K J, Marton D, Todorov S S, Al-Bayatti A H, Kulik J, Zuhr R A and Rabalais J W 1995 J. Vac. Sci. Technol. A 13 2110
5. Rossi F, Andre B, van Veen A, Mijnarends P E, Schut H, Labohm F, Dunlop H, Delplancke M P and Hubburd K 1994 J. Mater. Res. 9 2440
6. Ronning C, Feldermann H, Merk R, Hofsass H, Reinke P and Thiele J-U 1998 Phys. Rev. B 58 2207
7. Bacal M and Peyre J P 1999 Appl. Surface Sci. 138-9 155
8. Barber M, Connor J A, Guest M F, Hillier I H, Schwartz M and Stacey M 1973 J. Chem. Soc. Faraday Trans. II 69 551
9. Beamson G and Briggs D 1992 High Resolution XPS of Organic Polymers The Scienta ESCA 300 Database (Chichester: Wiley) pp 182-224
10. Dementjev A P, de Graaf A, Dolgiy D I, Olshanski E D, Shulga Y M and Serov A A 1999 Diam. Relat. Mater. 8 601
11. Dementjev A P, Petukhov M N and Baranov A M 1998 Diam. Relat. Mater. 7 1354