Fluctuations and correlations in sputtering and defect generation in collision cascades in Si

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 164, Issue , 2000, Pages 460-470

  Chakarova, R ^a   Pazsit I ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COMPUTATIONAL METHODS; COMPUTER SOFTWARE; CORRELATION METHODS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL DEFECTS; FUNCTIONS; ION BEAMS; ION BOMBARDMENT; METHOD OF MOMENTS; RADIATION DAMAGE; SEMICONDUCTING GERMANIUM;

SOFTWARE PACKAGE MARLOWE;

SEMICONDUCTING SILICON;

EID: 0342906542     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)01137-4     Document Type: Article

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