Study of electrical measurement techniques for ultra-shallow dopant profiling

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 397-403

  Ishida, Emi ^a   Felch, Susan B ^b  

^a SEMATECH   (United States)

^b VARIAN MEDICAL SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342830392     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588482     Document Type: Article

References (18)

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