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Volumn 36, Issue 27, 1997, Pages 7080-7085

Optimization of a beam delivery system for a short-pulse KrF laser used for material ablation

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EID: 0342811585     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.007080     Document Type: Article
Times cited : (10)

References (24)
  • 4
    • 0023600627 scopus 로고
    • Femtosecond UV excimer laser ablation
    • S. Kuper and M. Stuke, “Femtosecond UV excimer laser ablation,” Appl. Phys. B 44, 199-204 (1987).
    • (1987) Appl. Phys. B , vol.44 , pp. 199-204
    • Kuper, S.1    Stuke, M.2
  • 5
    • 0343703840 scopus 로고
    • Nanosecond and femtosecond excimer laser ablation of fused silica
    • J. Ihlemann, B. Wolff, and P. Simon, “Nanosecond and femtosecond excimer laser ablation of fused silica,” Appl. Phys. A 54, 363-368 (1992).
    • (1992) Appl. Phys. A , vol.54 , pp. 363-368
    • Ihlemann, J.1    Wolff, B.2    Simon, P.3
  • 7
    • 0029344114 scopus 로고
    • Sub-picosecond UV laser ablation of metals
    • S. Preuss, A. Demchuk, and M. Stuke, “Sub-picosecond UV laser ablation of metals,” Appl. Phys. A 61, 33-37 (1995).
    • (1995) Appl. Phys. A , vol.61 , pp. 33-37
    • Preuss, S.1    Demchuk, A.2    Stuke, M.3
  • 8
    • 0030286598 scopus 로고    scopus 로고
    • Machining of submicron structures on metals and semiconductors by ultrashort UV-laser pulses
    • P. Simon and J. Ihlemann, “Machining of submicron structures on metals and semiconductors by ultrashort UV-laser pulses,” Appl. Phys. A 63, 505-508 (1996).
    • (1996) Appl. Phys. A , vol.63 , pp. 505-508
    • Simon, P.1    Ihlemann, J.2
  • 10
    • 0025517345 scopus 로고
    • High-performance laser beam shaping and homogenization system for semiconductor processing
    • M. Wagner, H. D. Geiler, and D. Wolff, “High-performance laser beam shaping and homogenization system for semiconductor processing,” Meas. Sci. Technol. 1, 1193-1201 (1990).
    • (1990) Meas. Sci. Technol. , vol.1 , pp. 1193-1201
    • Wagner, M.1    Geiler, H.D.2    Wolff, D.3
  • 11
    • 0018987240 scopus 로고
    • Production of flat top beam profiles for high energy lasers
    • R. E. Grojean, D. Feldman, and J. F. Roach, “Production of flat top beam profiles for high energy lasers,” Rev. Sci. Instrum. 51, 375-376 (1980).
    • (1980) Rev. Sci. Instrum. , vol.51 , pp. 375-376
    • Grojean, R.E.1    Feldman, D.2    Roach, J.F.3
  • 13
    • 0021407069 scopus 로고
    • Beam intensity uniformization by mirror folding
    • M. R. Latta and K. Jain, “Beam intensity uniformization by mirror folding,” Opt. Commun. 49, 435-439 (1984).
    • (1984) Opt. Commun. , vol.49 , pp. 435-439
    • Latta, M.R.1    Jain, K.2
  • 14
    • 0019077085 scopus 로고
    • Refractive optical systems for irradiance redistribution of collimated radiation
    • P. W. Rhodes and D. L. Shealy, “Refractive optical systems for irradiance redistribution of collimated radiation,” Appl. Opt. 19, 3545-3553 (1980).
    • (1980) Appl. Opt. , vol.19 , pp. 3545-3553
    • Rhodes, P.W.1    Shealy, D.L.2
  • 15
    • 0020846162 scopus 로고
    • A simple optical device for generating square flat-top intensity irradiation from a Gaussian laser beam
    • Y. Kawamura, Y. Itagaki, K. Toyoda, and S. Namba, “A simple optical device for generating square flat-top intensity irradiation from a Gaussian laser beam,” Opt. Commun. 48, 44-46 (1983).
    • (1983) Opt. Commun. , vol.48 , pp. 44-46
    • Kawamura, Y.1    Itagaki, Y.2    Toyoda, K.3    Namba, S.4
  • 16
    • 0020767429 scopus 로고
    • Use of induced spatial incoherence for uniform illumination of laser fusion targets
    • R. H. Lehmberg and S. P. Obenschain, “Use of induced spatial incoherence for uniform illumination of laser fusion targets,” Opt. Commun. 46, 27-31 (1983).
    • (1983) Opt. Commun. , vol.46 , pp. 27-31
    • Lehmberg, R.H.1    Obenschain, S.P.2
  • 17
    • 0002780318 scopus 로고
    • Illumination uniformity of laser fusion pellets using induced spatial incoherence
    • A. J. Schmitt and J. H. Gardner, “Illumination uniformity of laser fusion pellets using induced spatial incoherence,” J. Appl. Phys. 60, 6-13 (1986).
    • (1986) J. Appl. Phys. , vol.60 , pp. 6-13
    • Schmitt, A.J.1    Gardner, J.H.2
  • 18
    • 84975636160 scopus 로고
    • Cylindrical flys eye lens for intensity redistribution of an excimer laser beam,”
    • Y. Ozaki and K. Takamoto, “Cylindrical fly’s eye lens for intensity redistribution of an excimer laser beam,” Appl. Opt. 28, 106-110 (1989).
    • (1989) Appl. Opt. , vol.28 , pp. 106-110
    • Ozaki, Y.1    Takamoto, K.2
  • 19
    • 84975641292 scopus 로고
    • Uniform illumination of large targets using a lens array
    • X. Deng, X. Liang, Z. Chen, W. Yu, and R. Ma, “Uniform illumination of large targets using a lens array,” Appl. Opt. 25, 377-381 (1986).
    • (1986) Appl. Opt. , vol.25 , pp. 377-381
    • Deng, X.1    Liang, X.2    Chen, Z.3    Yu, W.4    Ma, R.5
  • 20
    • 0001072796 scopus 로고
    • Direct production of gratings on plastic substrates using 248-nm KrF laser radiation
    • K. J. Ilcisin and R. Fedosejevs, “Direct production of gratings on plastic substrates using 248-nm KrF laser radiation,” Appl. Opt. 26, 396-400 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 396-400
    • Ilcisin, K.J.1    Fedosejevs, R.2
  • 21
    • 0024099488 scopus 로고
    • Simplified laser system for the generation of 60fs pulses at 248nm
    • S. Szatmari and F. P. Schafer, “Simplified laser system for the generation of 60fs pulses at 248nm,” Opt. Commun. 68, 196-202 (1988).
    • (1988) Opt. Commun. , vol.68 , pp. 196-202
    • Szatmari, S.1    Schafer, F.P.2
  • 22
    • 0000256511 scopus 로고
    • Intensity-dependent loss properties of window materials at 248 nm
    • P. Simon, H. Gerhardt, and S. Szatmari, “Intensity-dependent loss properties of window materials at 248 nm,” Opt. Lett. 14, 1207-1209 (1989).
    • (1989) Opt. Lett. , vol.14 , pp. 1207-1209
    • Simon, P.1    Gerhardt, H.2    Szatmari, S.3
  • 23
    • 84975580954 scopus 로고
    • Distortion of femtosecond laser pulses in lenses
    • Z. Bor, “Distortion of femtosecond laser pulses in lenses,” Opt. Lett. 14, 119-121 (1989).
    • (1989) Opt. Lett. , vol.14 , pp. 119-121
    • Bor, Z.1
  • 24
    • 0024132820 scopus 로고
    • Pulse front and pulse duration distortion in refractive optics and its compensation
    • S. Szatmàri and G. Kiihnle, “Pulse front and pulse duration distortion in refractive optics and its compensation,” Opt. Com-mun. 69, 60-65 (1988).
    • (1988) Opt. Com-Mun. , vol.69 , pp. 60-65
    • Szatmàri, S.1    Kiihnle, G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.