Thin film microstructure and process simulation using SIMBAD

Thin Films

Volumn 22, Issue C, 1996, Pages 1-79

  Brett, Michael J ^a   Dew, Steven K ^a   Smy, Tom J ^b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342779580     PISSN: 10794050     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1079-4050(96)80003-2     Document Type: Article

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