Characterization of antenna effect by nondestructive gate current measurement

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 8 SUPPL. B, 1996, Pages

  Lin, Horng Chih ^a   Chien, Chao Hsin ^b   Huang, Tiao Yuan ^a,b  

^a NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Antenna effect; Damage; Gate current; Metal etching; Plasma; Threshold voltage

Indexed keywords

EID: 0342779025     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l1044     Document Type: Article

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