Pump-down Characteristics of Titanium Vacuum Ducts at Room Temperature

Shinku/Journal of the Vacuum Society of Japan

Volumn 41, Issue 3, 1998, Pages 335-400

  Minato, Michio ^a   Itoh, Yoshio ^a  

^a Vacuum Metallurgical Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342771879     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.41.335     Document Type: Article

References (2)

1. M. Minato and Y. Itoh: J. Vac. Sci. Technol., A13 (1995) 540.
2. M. Minato and Y. Itoh: Nucl. Instr. Meth. B, 121 (1997) 187.