Vacuum characteristics of TiN film coated on the interior surface of a vacuum duct

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 187-190

  Minato, Michio ^a   Itoh, Yoshio ^a  

^a Vacuum Metallurgical Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEGASSING; ELECTRODEPOSITION; FILMS; PLATING; POLISHING; STAINLESS STEEL; VACUUM TECHNOLOGY;

VACUUM CHARACTERISTICS;

TITANIUM NITRIDE;

EID: 0031546214     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00544-7     Document Type: Article

References (9)

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