Formation and characterisation of c-BN thin films deposited by microwave PECVD

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1369-1374

  Soltani, Ali ^a   Thévenin, Philippe ^a   Bath, Armand ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

Author keywords

BN phases; Chemical vapour deposition; Cubic boron nitride; Infrared

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; INFRARED SPECTROSCOPY; ORGANOMETALLICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

CUBIC PHASES;

DIAMONDS;

BORON NITRIDE;

EID: 0342467937     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00416-7     Document Type: Article

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