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Volumn 58, Issue 1-3, 1999, Pages 415-419
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Medical pressure sensors on the basis of silicon microcrystals and SOI layers
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Author keywords
[No Author keywords available]
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Indexed keywords
BLOOD VESSELS;
CRYSTALLIZATION;
CRYSTALS;
DESIGN;
LASER APPLICATIONS;
MEDICAL APPLICATIONS;
MICROACTUATORS;
MICROSENSORS;
PRESSURE MEASUREMENT;
SEMICONDUCTING SILICON;
ARTERIAL PRESSURE MEASUREMENT;
MEDICAL PRESSURE SENSORS;
MEDICAL TESTS;
PIEZORESISTIVE PRESSURE SENSORS;
SILICON MICROCRYSTALS;
BIOSENSORS;
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EID: 0342322767
PISSN: 09254005
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-4005(99)00121-5 Document Type: Article |
Times cited : (27)
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References (4)
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