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Volumn 58, Issue 1-3, 1999, Pages 415-419

Medical pressure sensors on the basis of silicon microcrystals and SOI layers

Author keywords

[No Author keywords available]

Indexed keywords

BLOOD VESSELS; CRYSTALLIZATION; CRYSTALS; DESIGN; LASER APPLICATIONS; MEDICAL APPLICATIONS; MICROACTUATORS; MICROSENSORS; PRESSURE MEASUREMENT; SEMICONDUCTING SILICON;

EID: 0342322767     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00121-5     Document Type: Article
Times cited : (27)

References (4)
  • 3
    • 0026187499 scopus 로고
    • Piezoresistance effect of silicon
    • Kanda J. Piezoresistance effect of silicon. Sensors and Actuators A. 28:1991;83-91.
    • (1991) Sensors and Actuators a , vol.28 , pp. 83-91
    • Kanda, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.