Addition of He to Ar during sputter deposition of electroluminescent ZnS:TbOF thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 5, 2003, Pages 2048-2053

  Kim, J P ^a   Davidson, M R ^a   Holloway, P H ^b  

^a UNIVERSITY OF FLORIDA   (United States)

^b University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; ANNEALING; ARGON; HELIUM; LUMINESCENT DEVICES; MIXING; PERMITTIVITY; SPUTTER DEPOSITION; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

BRIGHTNESS; FULL WIDTH HALF MAXIMUM; THIN ELECTROLUMINESCENT DEVICES;

THIN FILMS;

EID: 0242677573     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1605428     Document Type: Article

References (23)

1. H. Kobayashi, and S. Tanaka, J. Soc. Inf. Disp. 4, 157 (1996).
2. R. H. Mauch, J. Soc. Inf. Disp. 5, 173 (1997).
3. P. D. Rack, A. Naman, P. H. Holloway, S. S. Sun, and R. T. Tuenge, MRS Bull. 21, 49 (1996).
4. Y. A. Ono, Annu. Rev. Mater. Sci. 27, 283 (1997).
5. C. N. King, J. Soc. Inf. Disp. 4, 153 (1996)
6. R. Mach and G. O. Mueller, Semicond. Sci. Technol. 6, 305 (1991).
7. C. N. King, Mater. Res. Soc. Symp. Proc. 508, 247 (1998).
8. P. D. Rack and P. H. Holloway, Mater. Sci. Eng. 21, 171 (1998).
9. J. P. Kim, M. Davidson, D. Moorehead, M. Puga-Lambers, Q. Zhai, and P. H. Holloway, J. Vac. Sci. Technol. A 19, 2244 (2001).
10. J. P. Kim, M. R. Davidson, B. Speck, D. J. Morehead, Q. Zhai, and P. H. Holloway, J. Vac. Sci. Technol. A 19, 2490 (2001).
11. K. Okamoto, T. Yoshimi, K. Nakamura, T. Kobayashi, S. Sato and S. Miura Jpn. J. Appl. Phys., Part 1 28, 1378 (1989).
12. H. Xian, P. Benalloul, C. Barthou, and J. Benoit, Thin Solid Films 248, 193 (1994).
13. J. M. Blackmore and A. G. Culis, Thin Solid Films 199, 321 (1991).
14. K. E. Waldrip et al., Display and Imaging, 8, Suppl. 1, p. 73.
15. R. Mach and G. O. Mueller, J. Cryst. Growth 101, 967 (1990).
16. L. I. Maissel, and R. Glang, Handbook of Thin Film Technology (McGraw-Hill, New York, 1970).
17. S. L. Jones, D. Kumar, K. G. Cho, R. Singh and P. H. Holloway, Displays 19, 151 (1999).
18. I. Schnitzer, E. Yablonovitch, C. Caneau, T. J. Gmitter, and A. Scherer, Appl. Phys. Lett. 63, 2174 (1993).
19. M. Noma, S. Hosomi, S. H. Sohn and Y. Hamakawa, J. Cryst. Growth 117, 1030 (1992).
20. J. Van Den Bossche et al., Phys. Status Solidi A 146, k67 (1994).
21. J. C. Hitt, J. P. Bender, and J. F. Wager, Crit. Rev. Solid State Mater. Sci. 25, 29 (2000).
22. Y. A. Ono, Electroluminescent Displays (World Scientific, Singapore, 1995).
23. Handbook of Physics and Chemistry, 78th ed., edited by D. R. Lide (CRC Press, Boca Raton, FL, 1997).