ZnS:TbOF thin films sputter deposited from a single versus separate ZnS and TbOF targets

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2490-2493

  Kim, J P ^a   Davidson, M R ^b   Speck, B ^b   Moorehead, D J ^a   Zhai, Q ^a   Holloway, P H ^a  

^a University of Florida   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; ELECTROLUMINESCENCE; EVAPORATION; FILM GROWTH; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; PERMITTIVITY; PHOSPHORS; PHYSICAL VAPOR DEPOSITION; RATE CONSTANTS; SPUTTER DEPOSITION; TERBIUM COMPOUNDS; THRESHOLD VOLTAGE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZINC SULFIDE;

SINGLE PRESSED POWDERS;

THIN FILMS;

EID: 0035441833     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1388619     Document Type: Article

References (22)