Dependence of Morphology of AlN Thin Films on Laser Irradiation in Pulsed Laser Deposition

Laser Physics

Volumn 13, Issue 10, 2003, Pages 1325-1329

  Zorba, V ^a,b   Klini, A ^a   Gyorgy, E ^c   Ristoscu, C ^c   Teodorescu, V S ^c   Mihailescu, I N ^c   Fotakis, C ^a,b  

^a INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^b UNIVERSITY OF CRETE   (Greece)

^c INSTITUTE OF ATOMIC PHYSICS   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; LASER BEAM EFFECTS; LOW TEMPERATURE EFFECTS; NITROGEN; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY;

GAS-PHASE CONDENSATION;

THIN FILMS;

EID: 0242666937     PISSN: 1054660X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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