Surface Structure of Electrochemically Etched α-SiC Substrates

Materials Science Forum

Volumn 433-436, Issue , 2003, Pages 717-720

  Mikami, H ^a   Umetani, A ^a   Hatayama, T ^a   Yano, H ^a   Uraoka, Y ^a   Fuyuki, T ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Anisotropy; Micropipes; Step Bunching; Wet Etching

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; CURRENT DENSITY; ELECTROCHEMISTRY; EPITAXIAL GROWTH; ETCHING; PHOTOCURRENTS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE STRUCTURE;

ELECTROCHEMICAL ETCHING;

SILICON CARBIDE;

EID: 0242664950     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.433-436.717     Document Type: Conference Paper

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