Cylindrical Polarization Symmetry for Nondestructive Nano-Characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5045, Issue , 2003, Pages 85-92

  Zhan, Qiwen ^a  

^a UNIVERSITY OF DAYTON   (United States)

Author keywords

Apertureless NSOM; Microellipsometer; Nondestructive nano characterization; Polarization; Surface plasmon

Indexed keywords

DATA STORAGE EQUIPMENT; ELLIPSOMETRY; LASER BEAMS; POLARIZATION; SIGNAL TO NOISE RATIO;

HIGH-DENSITY DATA STORAGE; SCANNING OPTICAL MICROSCOPE;

NONDESTRUCTIVE EXAMINATION;

EID: 0242609830     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.497948     Document Type: Conference Paper

References (29)

1. B. Sick, B. Hecht and L. Novotny, "Orientational imaging of single molecules by annular illumination," Phys. Rev. Lett. 85, pp. 4482-4485 (2000).
2. L. E. Helseth, "Roles of polarization, phase and amplitude in solid immersion lens system," Optics Comm. 191, pp. 161-172 (2001).
3. S. Quabis, R. Dorn, M. Eberler, O. Glöckl and G. Leuchs, "The focus of light- theoretical calculation and experimental tomographic reconstruction," Appl. Phys. B 72, pp. 109-113 (2001).
4. S. Quabis, R. Dorn, M. Eberler, O. Glöckl and G. Leuchs, "Focusing light into a tighter spot", Optics Comm. 179, pp. 1-7 (2000).
5. K. Schuster, "Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangement," US patent #6191880 B1 (2001).
6. T. Kuga, Y. Torii, N. Shiokawa and T. Hirano, "Novel optical trap of atoms with a doughnut beam", Phys. Rev. Lett. 78, pp. 4713-4716 (1997).
7. S. Sato, Y. Harada and Y. Waseda, "Optical trapping of microscopic metal particles", Opt. Lett. 19, pp.1807-1809 (1994).
8. Q. Zhan and J. Leger, "Focus shaping using cylindrical vector beams," Optics Express, 10, 324-331, (2002).
9. V. G. Niziev and A. V. Nesterov, "Influence of beam polarization on laser cutting efficiency", J. Phys. D. 32, pp. 1455-1461 (1999).
10. Q. Zhan, "Novel polarization measurement and manipulation techniques for nanometer scale applications," Ph.D. dissertation, University of Minnesota - Twin Cities, (2002).
11. 01," Appl. Phys. Lett. 20, pp. 266-267 (1972).
12. M. W. Beijersbergen, L. Allen, H. E. L. O. van der Veen and J. P. Woerdman, "Astigmatic laser mode converters and transfer of orbital angular momentum," Optics Comm. 96, pp. 123-132 (1993).
13. M. W. Beijerbergen, R. P. C. Coerwinkel, M. Kristensen, J. P. Woerdman, "Helical-wavefront laser beam produced with a spiral phaseplae," Optics Comm. 112, pp. 321-327 (1994).
14. M. Stalder and M. Schadt, "Linearly polarized light with axial symmetry generated by liquid-crystal polarization converters," Opt. Lett. 21, pp. 1948-1950 (1996).
15. Z. Bomzon, G. Biener, V. Kleiner, and E. Hasman, "Radially and azimuthally polarized beams generated by space-variant dielectric subwavelength gratings," Opt. Lett. 27, pp. 285-287 (2002).
16. R. Oron, N. Davidson, A. A. Friesem and E. Hasman, "Efficient formation of pure helical laser beams," Optics Comm. 182, pp. 205-208 (2000).
17. R. Oron, S. Blit, N. Davidson and A. A. Friesem, "The formation of laser beams with pure azimuthal or radial polarization," Appl. Phys. Lett. 77, pp. 3322-3324 (2000).
18. C. Shih, "Radial polarization laser resonator," US patent #5359622, (1994).
19. F. P. Schäfer, "Method and device for polarizing light radiation," US patent #4755027 (1988).
20. Q. Zhan and J. Leger, "Microellipsometer with radial symmetry, " Applied Optics, 41, pp. 4630-4637, (2002).
21. Q. Zhan and J. Leger, "Interferometric measurement of Berry's phase in space-variant polarization manipulations," Optics Communications, 213, pp.241-245, (2002).
22. M. V. Berry, "Quantal phase factors accompanying adiabatic changes," Proc. R. Soc. London A 392, pp. 45-57, (1984).
23. S. Pancharatnam, "Generalized theory of interference and its applications," Proc. Indian Acad. Sci. A 44, pp. 247-262, (1956).
24. T. Grosjean, D. Courjon, and M. Spajer, "An all-fiber device for generating radially and other polarized light beams," Optics Comm. 203, pp. 1-5 (2002).
25. H. Kano, S. Mizuguchi and S. Kawata, "Excitation of surface-plasmon polaritons by a focused laser beam," J. Opt. Soc. Am. B. 15, pp. 1381-1386 (1998).
26. H. Raether, Surface plasmons on smooth and rough surfaces and gratings, Spinger-Verlag, Berlin (1988).
27. B. Rothenhäusler and W. Knoll, "Surface-plasmon microscopy," Nature 332, pp. 615-617 (1988).
28. C. E. H. Berger, R. P. H. Kooyman and J. Greve, "Resolution in surface plasmon microscopy", Rev. Sci. Instrum. 65, pp. 2829-2836 (1994).
29. R. M. A. Azzam and N. M. Bashara, Ellipsometry and polarized light, North Holland Publishing Company, New York (1977).