Fast sampling multipixel detector for a heterodyne interferometer with angstrom precision

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5036, Issue , 2002, Pages 25-30

  Soloviev, Oleg ^a   Vdovin, Gleb ^a   Krieg, Luke ^a   De Lima Monteiro, Davies ^a   Braat, Joseph ^a   French, Paddy ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Absolute interferometry; Heterodyning; Interferometry; Mirror figure measurements

Indexed keywords

CHARGE COUPLED DEVICES; ERROR ANALYSIS; INTERFEROMETRY; LITHOGRAPHY; OPTICAL SENSORS; PHASE MODULATION;

OPTICAL SIGNALS;

HETERODYNING;

EID: 0242492026     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.498238     Document Type: Conference Paper

References (6)

1. R. Klaver, Novel interferometer to measure the figure of strongly aspherical mirrors. PhD thesis, TU Delft, 2001.
2. L. Krieg, R. Klaver, and J. J.J.M. Braat, "Absolute optical path difference measurement with angstrom accuracy over ranges of millimetres," in Optical Measurement Systems for Industrial Inspection II: Application in Industrial Design, 4398, pp. 116-126, 10/ 2001.
3. D. Malacara, M. Servín, and Z. Malacara, Interferogram analysis for optical testing, ch. Signal Phase Detection. Dekker, New York, 1998.
4. R. Lange and P. Seitz, "Solid-state time-of-flight range camera," IEEE JOURNAL OF QUANTUM ELECTRONICS 37, pp. 390-397, March 2001.
5. S. Nakadate, "Phase detection of equidistant fringes for highly sensitive optical sensing, i. principle and error analyses," J. Opt. Soc. Am. A 5, pp. 1265-1269, August 1988.
6. D. W. de Lima Monteiro and G. Vdovin, "High speed integrated wavefront sensor," in Proc. Sensor Technology Conference, pp. 37-42, (Enschede), May 2001.