Industry Survey on Non-visual Defect Detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5041, Issue , 2003, Pages 173-182

  Boye, Carol A ^a  

^a SEMATECH   (United States)

Author keywords

Business trends; Defect classification; Defect detection; Non visual defects; Yield management

Indexed keywords

ASPECT RATIO; DEFECTS; FAILURE ANALYSIS; INFORMATION TECHNOLOGY; SEMICONDUCTOR MATERIALS;

NON-VISUAL DEFECTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0242441059     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485211     Document Type: Conference Paper

References (1)

1. T. Turner, "Detecting Non-Visual Defects is Vital for 0.18um", Semiconductor International, pp. 287-294, July 2000.