Plasma and Ion Beam Surface Engineering for Practical Applications

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2003, Pages 431-436

  Wei, R ^a   Arps, J ^a   Lanning, B ^a  

^a SOUTHWEST RESEARCH INSTITUTE   (United States)

Author keywords

Ion beam assisted deposition (IBAD); Plasma and ion beam surface engineering; Plasma immersion ion processing (PIIP); Tribological applications

Indexed keywords

ENVIRONMENTAL IMPACT; ION BEAM ASSISTED DEPOSITION; ION IMPLANTATION; MAGNETRON SPUTTERING; MULTILAYERS; PLASMA APPLICATIONS;

SURFACE ENGINEERING;

SURFACE TREATMENT;

EID: 0242384958     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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