Investigation of flow mechanisms in semiconductor wafer fabrication

International Journal of Production Research

Volumn 41, Issue 4, 2003, Pages 681-698

  Kim, S ^a   Davis, K R ^b   Cox III, J F ^b  

^a Seoul National University of Science and Technology   (South Korea)

^b UNIVERSITY OF GEORGIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA REDUCTION; FEEDBACK CONTROL; REAL TIME SYSTEMS; SCHEDULING;

CYCLE TIMES;

SILICON WAFERS;

EID: 0242333121     PISSN: 00207543     EISSN: None     Source Type: Journal    
DOI: 10.1080/0020754031000065476     Document Type: Article

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