Ion assisted growth and characterization of polycrystalline silicon and silicon-germanium films

Journal of Applied Physics

Volumn 83, Issue 8, 1998, Pages 4472-4476

  Saha, Chumki ^a   Das, S ^a   Ray, S K ^a   Lahiri, S K ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0242332370     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367209     Document Type: Article

References (14)

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