Deposition of Coatings via Atmospheric Plasma-Enhanced CVD

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2003, Pages 85-88

  Dinega, D P ^a   Gabelnick, A M ^a   Lambert, C A ^a  

^a DOW CHEMICAL COMPANY   (United States)

Author keywords

Atmospheric pressure deposition; Corona discharge; Permeation barrier coatings; Silica coatings

Indexed keywords

ATMOSPHERIC PRESSURE; ATOMIC FORCE MICROSCOPY; DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICA; SUBSTRATES;

CORONA DISCHARGE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0242322441     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Y. Sawada, S. Ogawa, M. Kogoma, "Synthesis of Plasma-Polymerized Tetraethoxy silane and Haxamethyldisiloxane Films Prepared by Atmospheric Pressure Glow Discharge," J. Phys. D: Appl. Phys., 28, 1661, 1995.
2. R. Thyen, A. Weber, C.-P. Klages, "Plasma-Enhanced chemical-Vapor-Deposition of Thin Films by Corona Discharge at Atmospheric Pressure," Surf. Coat. Technol., 97, 426, 1997.
3. K. Schmidt-Szalowski, et.al., "Thin Films Deposition from Hexamethyldisiloxane and Hexamethyldisilazane under Dielectric-Barrier Discharge Conditions," Plasm. Polym., 5, 173, 2000.
4. G. N. Deshpande, M. B. Jones, A. T. Hunt, "Silica-Based Oxygen Barrier Coatings onto PET Film via Combustion Chemical Vapor Deposition," 45th Annual Techncial Conference Proceedings of the Society of Vacuum Coaters, p. 93, 2002.
5. I.-F. Hu et al.,US Patent # 5718967; I.-F. Hu, J. C. Tou, US Patent # 5298587; I.-F. Hu et al, US Patent # 5718967; I.-F. Hu, J. C. Tou, US Patent # 5320875.
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7. I.-F. Hu et al.,US Patent # 5718967; I.-F. Hu, J. C. Tou, US Patent # 5298587; I.-F. Hu et al, US Patent # 5718967; I.-F. Hu, J. C. Tou, US Patent # 5320875.
8. I.-F. Hu et al.,US Patent # 5718967; I.-F. Hu, J. C. Tou, US Patent # 5298587; I.-F. Hu et al, US Patent # 5718967; I.-F. Hu, J. C. Tou, US Patent # 5320875.
9. W. Decker, B. Henry, "Basic Principals of Thin Film Barrier Coatings," 45th Annual Techncial Conference Proceedings of the Society of Vacuum Coalers, p. 492, 2002.