Effect of Pad Surface Texture and Slurry Abrasive Concentration on Tribological and Kinetic Attributes of ILD CMP

Materials Research Society Symposium - Proceedings

Volumn 767, Issue , 2003, Pages 119-125

  Philipossian, Ara ^a   Olsen, Scott ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; ELASTOHYDRODYNAMIC LUBRICATION; TEXTURES; TRIBOLOGY;

PAD SURFACE TEXTURES;

CHEMICAL MECHANICAL POLISHING;

EID: 0242291001     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-767-f2.8     Document Type: Conference Paper

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