Flat panel imagers based on excimer laser annealed, poly-Si thin film transistor technology

Materials Research Society Symposium Proceedings

Volumn 685, Issue , 2001, Pages 29-34

  Lu, J P ^a   Van Schuylenbergh, K ^a   Fulks, R T ^a   Ho, J ^a   Wang, Y ^a   Lau, R ^a   Nylen, P ^a   Mei, P ^a   Mulato, M ^a   Boyce, J B ^a   Street, R A ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EXCIMER LASERS; LASER APPLICATIONS; PIXELS; POLYSILICON; THIN FILM TRANSISTORS;

FLAT PANEL IMAGERS; NOISE PERFORMANCE; PULSED EXCIMER-LASER ANNEALING (ELA);

IMAGE SENSORS;

EID: 0142258622     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-685-d2.3.1     Document Type: Conference Paper

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