Optimal control of arrays of microcantilevers

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 121, Issue 4, 1999, Pages 686-690

  Napoli, Mariateresa ^a   Bamieh, Bassam ^a   Dahleh, Mohammed ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0142177450     PISSN: 00220434     EISSN: 15289028     Source Type: Journal    
DOI: 10.1115/1.2802535     Document Type: Article

References (11)

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5. B. Bamieh, 1997, “The Structure of Optimal Controllers of Spatially-Invariant Distributed Parameter Systems,” Proc. 36’th IEEE Conference on Decision and Control, San Diego, CA, Dec.
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8. Dror Sarid, 1994, Scanning Force Microscopy, Oxford University Press, New York.
9. Jacob N. Israelachvili, 1985, Intermolecular and Surface Forces, Academic Press.
10. S. C. Minne, S. R. Manalis, and C. F. Quate, 1995, “Parallel Atomic Force Microscopy Using Cantilevers with Integrated Piezoresistive Sensors and Integrated Piezoelectric Actuators,” Appl Phys. Lett., Vol. 67(25), pp. 3918-3920, Dec.
11. S. C. Minne, S. R. Manalis, A. Atalar, and C. F. Quate, 1996, “Independent Parallel Lithography Using the Atomic Force Microscope,” J. Vac. Sci. Technology, Vol. B. 14(4), pp. 2456-2461, July.