Effect of grain structure on the onset of diffusion-controlled stress relaxation in Pt thin films

Applied Physics Letters

Volumn 83, Issue 14, 2003, Pages 2769-2771

  Hyun, S ^a   Vinci, R P ^a   Fahey, K P ^b   Clemens, B M ^b  

^a Lehigh University   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DIFFUSION; SPUTTERING; STRESS RELAXATION; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

SCANNING PROBE MICROSCOPY;

THIN FILMS;

EID: 0142167540     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1615311     Document Type: Article

References (13)

1. D. Weiss, H. Gao, and E. Arzt, Acta Mater. 49, 2395 (2001).
2. M. J. Kobrinski and C. V. Thompson, Appl. Phys. Lett. 73, 2429 (1998).
3. R. P. Vinci, E. M. Zielinski, and J. C. Bravman, Thin Solid Films 262, 142 (1995).
4. M. D. Thouless, J. Gupta, and J. M. E. Harper, J. Mater. Res. 8, 1845 (1993).
5. H. Gao, L. Zhang, W. D. Nix, C. V. Thompson, and E. Arzt, Acta Mater. 47, 2865 (1999).
6. P. D. Hren, H. Al Shareef, S. H. Rou, A. I. Kingon, P. Buaud, and E. A. Irene, Mater. Res. Soc. Symp. Proc. 260, 575 (1992).
7. G. A. C. M. Spierings, G. J. M. Dormans, W. G. J. Moors, M. J. E. Ulenaers, and P. K. Larsen, J. Appl. Phys. 78, 1926 (1995).
8. P. A. Flinn, Mater. Res. Soc. Symp. Proc. 130, 41 (1992).
9. J. F. Turlo, Ph.D. dissertation, Stanford University, Stanford, CA, 1992.
10. T. R. Dalbec, O. S. Leung, and W. D. Nix, Deformation, Processing and Properties of Structural Materials, edited by E. M. Taleff (The Minerals, Metals & Materials Society, Warrendale, PA, 2000), p. 95.
11. H. J. Frost and M. F. Ashby, Deformation-Mechanism Maps: The Plasticity and Creep of Metals and Ceramics (Pergamon, Oxford, 1982).
12. A. M. Brown and M. F. Ashby, Acta Metall. 28, 1085 (1980).
13. M. S. Jackson and C. Li, Acta Metall. 30, 1993 (1982).