Drying and Functionalization of Triethoxyfluorosilane-Based Low-k Dielectrics in CO2

Electrochemical and Solid-State Letters

Volumn 6, Issue 11, 2003, Pages

  Gorman, B P ^a   Mueller, D W ^a   Reidy, R F ^b  

^a UNIVERSITY OF NORTH TEXAS   (United States)

^b Center for Advanced Research and Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; DIELECTRIC MATERIALS; DRYING; POROUS MATERIALS; SOLVENTS;

SILYLATION;

SILANES;

EID: 0142157671     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1615353     Document Type: Article

References (10)

1. L. Hrubesh and S. R. Buckley, Mater. Res. Soc. Symp. Proc., 476, 99 (1997).
2. S. Rogojevic, A. Jain, W. N. Gill, and J. Plawsky, Electrochem. Solid-State Lett., 5, F22 (2002).
3. J.-H. Kim, S.-B. Jung, H.-H. Park, and S.-H. Hyun, Thin Solid Films, 377-378, 467 (2000).
4. S. S. Prakash, C. J. Brinker, and A. J. Hurd, J. Non-Cryst. Solids, 190, 264 (1995).
5. A. V. Rao, E. Nilsen, and M.-A. Einarsrud, J. Non-Cryst. Solids, 296, 165 (2001).
6. C. Cao, A. Y. Fadeev, and T. J. McCarthy, Langmuir, 17, 757 (2001).
7. H. Namatsu, J. Vac. Sci. Technol. B, 18, 3308 (2000).
8. T. Clifford, Fundamentals of Supercritical Fluids, Oxford University Press, New York (1999).
9. B. P. Gorman, R. A. Orozco-Teran, J. A. Roepsch, H. Dong, R. F. Reidy, and D. W. Mueller, Appl. Phys. Lett., 79, 4010 (2001).
10. B. P. German, R. A. Orozco-Teran, Z. Zhang, P. Matz, D. W. Mueller, and R. Reidy, Appl. Phys. Lett., Submitted.