Photo-induced cross-linking mechanism in azide-novolac negative photoresists: Molecular level investigation using NMR spectroscopy

Magnetic Resonance in Chemistry

Volumn 41, Issue 9, 2003, Pages 671-678

  Roy, Debmalya ^a   Basu, P K ^a   Raghunathan, P ^b   Eswaran, S V ^c,d  

^a SOLID STATE PHYSICS LABORATORY   (India)

^b Fluorosis Research & Rural Development Foundation   (India)

^c UNIVERSITY OF DELHI   (India)

^d UNIVERSITY OF DELHI   (India)

Author keywords

13C NMR; 1H NMR; Crosslinking mechanism; Molecular modeling; Negative photoresists; NMR

Indexed keywords

AROMATIC COMPOUNDS; AROMATIZATION; HYDROGEN; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PHOTOLYSIS; PHOTORESISTS; REACTION INTERMEDIATES; RESINS;

13C NMR; 1H-NMR; AROMATIC MOIETIES; CROSS LINKING; CROSSLINKING MECHANISM; CROSSLINKING REACTION; EXPOSED PARTS; NEGATIVE PHOTORESISTS; NITRENES; NOVOLAC RESIN;

CROSSLINKING;

1,4 BENZOQUINONE; ALKENE DERIVATIVE; AROMATIC COMPOUND; AZIDE; CARBENOID; HYDROXYL GROUP; IMINE; NOVOLAC; RESIN; UNCLASSIFIED DRUG;

ARTICLE; CARBON NUCLEAR MAGNETIC RESONANCE; CASHEW NUT; CHEMICAL BINDING; CHEMICAL REACTION; CHEMICAL STRUCTURE; CROSS LINKING; PHOTOLYSIS; PROTON NUCLEAR MAGNETIC RESONANCE; STRUCTURE ANALYSIS;

EID: 0142056262     PISSN: 07491581     EISSN: None     Source Type: Journal    
DOI: 10.1002/mrc.1223     Document Type: Article

References (23)

1. Turner SR, Daly RC. J. Chem. Educ. 1988; 65: 322.
2. Ueno T. In Microlithography Science and Technology, Sheats JR, Smith BW (eds). Marcel Dekker: New York, 1998; 429.
3. Wallraff GM, Hinsberg WD. Chem. Rev. 1999; 99: 1801.
4. Roy D, Basu PK, Raghunathan P, Eswaran SV. Magn. Reson. Chem. 2003; 41: 84.
5. Smith PAS. In Azides and Nitrenes, Scriven EFV (ed.). Academic Press: New York, 1984; 95-203.
6. Scriven EFV, Turnbull K. Chem. Rev. 1988; 88: 298.
7. Buch G, Korth H-G. Angew. Chem., Int. Ed. Engl. 1999; 38: 212.
8. Karney WL, Borden WT. J. Am. Chem. Soc. 1997; 119: 1378.
9. Karney WL, Borden WT. J. Am. Chem. Soc. 1997; 119: 3347.
10. Crow WD, Wentrup C. Tetrahedron Lett. 1968; 27: 3115.
11. Hermansons GT. Bioconjugate Techniques. Academic Press: London, 1996.
12. Platz MS. Acc. Chem. Res. 1995; 28: 487.
13. Eswaran SV, Neela HY, Ramakumar S, Viswamitra MA. J. Heterocycl. Chem. 1996; 33: 1333.
14. Uchino S, Tanaka T, Ueno T, Iwayanagi T. J. Vac. Sci. Technol. B 1991; 9: 3162.
15. Hattori KT, Hattori T, Uchino S, Ueno T, Hayashi N, Shirai S, Moriuchi N, Morita M. Jpn. J. Appl. Phys. 1992; 31: 4307.
16. Baehr G, Westerwelle U, Gruetzner G. Proc. SPIE Int. Soc. Opt. Eng. 1997; 3049: 628.
17. Eswaran SV, Basu PK, Roy D. Patent Application No. PCT/IN/02/00109 (pending).
18. Roy D, Basu PK, Raghunathan P, Eswaran SV. J. Appl. Polym. Sci. 2003; 89: 1959.
19. Voigt Anja. PhD Thesis, University of Berlin, 1999.
20. Roy D, Basu PK, Raghunathan P, Eswaran SV. J. Appl. Polym. Sci. in press.
21. Silverstein RM, Webster FX. Spectroscopic Identification of Organic Compounds (6th edn). Wiley: New york, 1996; 163.
22. Mukoyama Y, Tanno T, Yokokawa H, Fleming J. J. Polym. Sci. 1973; 11: 3193.
23. Fitzgerald EA, Tadros SP, Almeida RF, Sienko GA, Honda K, Sarubbi T. J. Appl. Polym. Sci. 1992; 45: 363.