In situ sputter deposition discharge diagnostics for tailoring ceramic film growth

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1303-1310

  Aita, C R ^a  

^a UNIVERSITY OF WISCONSIN MILWAUKEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004912570     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581278     Document Type: Article

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