Spin defects and transport in hydrogenated nanocrystalline silicon carbide films produced by photo-CVD technique

Solid State Communications

Volumn 128, Issue 9-10, 2003, Pages 355-358

  Chevaleevski, Oleg ^a   Myong, Seung Yeop ^a   Lim, Koeng Su ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

A. Semiconductors; A. Thin films; E. Electron paramagnetic resonance

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; HYDROGENATION; NANOSTRUCTURED MATERIALS; PARAMAGNETIC RESONANCE; SEMICONDUCTING FILMS; X RAY DIFFRACTION;

AMORPHOUS MATRIX;

SILICON CARBIDE;

EID: 0141988529     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2003.08.040     Document Type: Article

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