Deposition of permalloy films by filtered cathodic vacuum arc

Thin Solid Films

Volumn 443, Issue 1-2, 2003, Pages 115-119

  Chen, J S ^a,b   Lau, S P ^a,b   Zhang, Y B ^a   Sun, Z ^a   Tay, B K ^a   Sun, C Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Filtered cathodic vacuum arc; Magnetic properties; Permalloy

Indexed keywords

CARBON; CATHODES; DEPOSITION; IRON COMPOUNDS; MAGNETIZATION; METALLIC FILMS; SILICON; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

PERALLOY FILMS;

MAGNETIC FILMS;

EID: 0141865600     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01031-9     Document Type: Article

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