Aberration optimizing system using Zernike sensitivity method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 III, Issue , 2003, Pages 1581-1590

  Shimizu, Yasuo ^a   Yamaguchi, Tadashi ^b   Suzuki, Kousuke ^a   Shiba, Yuji ^a   Matsuyama, Tomoyuki ^a   Hirukawa, Shigeru ^a  

^a NIKON CORPORATION   (Japan)

^b Nikon Systems Inc   (Japan)

Author keywords

Imaging performance; Optimization; Projection lens; Wavefront aberration; Zernike polynomials; Zernike sensitivity

Indexed keywords

ABERRATIONS; DISTORTION (WAVES); LENSES; OPTIMIZATION; POLYNOMIALS; SENSITIVITY ANALYSIS; WAVEFRONTS;

WAVEFRONT ABERRATIONS; ZERNIKE POLYNOMIALS; ZERNIKE SENSITIVITY;

IMAGING SYSTEMS;

EID: 0141832936     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485459     Document Type: Conference Paper

References (7)

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