Influence of nonuniform pupils in imaging periodical structures by photolithographic systems

Optical Engineering

Volumn 37, Issue 4, 1998, Pages 1353-1363

  Hild, Rosemarie ^a   Yzuel, Maria J ^b   Escalera, Juan C ^b   Campos, Juan ^b  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Apodization; Apparent transfer function; Depth of focus; Photolithography

Indexed keywords

EID: 0141782578     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601969     Document Type: Article

References (21)

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