Computer simulation of ion-solid interaction processes

Microelectronic Engineering

Volumn 69, Issue 2-4, 2003, Pages 570-576

  Dzhurakhalov, A A ^a  

^a ARIFOV INSTITUTE OF ELECTRONICS   (Uzbekistan)

Author keywords

Computer simulation; Energy and angular distributions; Grazing incidence; Implantation; Ion scattering; Sputtering; Surface atomic steps

Indexed keywords

COMPUTER SIMULATION; ENERGY DISSIPATION; ION BOMBARDMENT; ION EXCHANGE; ION IMPLANTATION; SINGLE CRYSTALS; SPUTTER DEPOSITION;

GRAZING INCIDENCE;

MICROELECTRONIC PROCESSING;

EID: 0141746386     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00348-4     Document Type: Conference Paper

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