Study of scattering properties of defects of silicone wafers

Optics and Spectroscopy (English translation of Optika i Spektroskopiya)

Volumn 84, Issue 4, 1998, Pages 557-562

  Eremin, Yu A ^a   Orlov, N V ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0141728235     PISSN: 0030400X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. Fujino, N. et al., Jpn. J. Appl. Phys., 1995, no. 12.
2. Eremin, Yu.A. and Orlov, N.V., Opt Spektrosk., 1997, vol. 82, no. 3, pp. 472-477.
3. Eremin, Yu.A. and Sveshnikov, A.G., Metod diskretnykh istochnikov v zadachakh elektromagnitnoi difraktsii (Method of Discrete Sources in Problems of Electromagnetic Diffraction), Moscow: Mosk. Gos. Univ., 1992.
4. Eremin, Yu.A., Orlov, N.V., and Rozenberg, V.I., Opt. Spektrosk., 1992, vol. 73, vol. 5, pp. 958-964.
5. Born, M. and Wolf, E., Principles of Optics, Oxford: Pergamon, 1969. Translated under the title Osnovy optiki, Moscow: Nauka, 1973.
6. Born, M. and Wolf, E., Principles of Optics, Oxford: Pergamon, 1969. Translated under the title Osnovy optiki, Moscow: Nauka, 1973.