Analysis of light scattering by microparticles on a surface of a silicon wafer

Optika i Spektroskopiya

Volumn 82, Issue 3, 1997, Pages 472-477

  Eremin, Yu A ^a   Orlov N V ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346106877     PISSN: 00304034     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Huff H. et al. // SEMATECH Meeting: Particle Counting / Microroughness Task Force. Minneapolis. June 23-24. 1994.
2. Wojcik G., Vaughan D., Galbraith L. // Lasers in microlithography. 1987. SPIE V. 774. P. 21-31.
3. Lee H. et al. // Aerosol Sci. Technol. 1991. V. 14. P. 177-192.