Ambient effects on the laser durability of 157 nm optical coatings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 I, Issue , 2003, Pages 487-498

  Liberman, V ^a   Rothschild, M ^a   Palmacci, S T ^a   Efremow, N N ^a   Sedlacek, J H C ^a   Grenville, A ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; DURABILITY; IRRADIATION; LASER DAMAGE; MANIPULATORS; OPTICAL DESIGN; OPTICS; OXYGEN; PROJECTION SYSTEMS; ULTRAVIOLET RADIATION; VAPORS; WATER;

GAS PHASE OXYGEN; LASER IRRADIATION; PROJECTION OPTICS SYSTEMS; WATER VAPOR;

LITHOGRAPHY;

EID: 0141682759     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.497525     Document Type: Conference Paper

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