Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in nitrogen Inductively Coupled Plasma Discharges

Chinese Physics Letters

Volumn 20, Issue 9, 2003, Pages 1527-1529

  Ma, Jie ^a   Pu, Yi Kang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; ELECTRON TEMPERATURE; INDUCTIVELY COUPLED PLASMA; INERT GASES; LANGMUIR PROBES; NITROGEN PLASMA;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; HIGH-ENERGY ELECTRON; INDUCTIVELY-COUPLED PLASMA; INERT GAS MIXTURES; LOW ENERGY ELECTRONS; MIXING RATIOS; PLASMA DISCHARGE; RF POWER; RF-POWER; TEMPERATURE STRUCTURE;

ELECTRON ENERGY ANALYZERS;

EID: 0141679048     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/20/9/334     Document Type: Article

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