Highly Manufacturable SONOS Non-Volatile Memory for the Embedded SoC Solution

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2003, Pages 31-32

  Kim, J H ^a   Cho, I W ^a   Bae, G J ^a   Kim, S S ^a   Kim, K C ^a   Kim, S H ^a   Koh, K W ^a   Lee, N I ^a   Kang, H K ^a   Suh, K P ^a   Kang, S T ^b   Seo, M K ^c   Lee, S H ^d   Kim, M C ^d   Park, I S ^d  

^a Advanced Technology Development   (South Korea)

^b EFL Process Architecture   (South Korea)

^c Memory Core   (South Korea)

^d SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CMOS INTEGRATED CIRCUITS; SEMICONDUCTOR JUNCTIONS; THRESHOLD VOLTAGE; CYTOLOGY; DIGITAL STORAGE; SILICON NITRIDE; SYSTEM-ON-CHIP;

SYSTEM-ON-CHIP (SOC);

NONVOLATILE STORAGE; CELLS;

'CURRENT; CELL CURRENT; CMOS LOGIC PROCESS; EMBEDDED SOC; LOCALISED; LOW THRESHOLD VOLTAGE; PROPERTY; SOC SOLUTIONS; SONOS STRUCTURE; STANDARD CMOS;

EID: 0141649583     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. B. Eitan et al., IEEE Elec. Dev. Lett., Vol. 21, p543, 2000.
2. D. A. Adams et al., IEEE Circuits and Devices Magazine, Vol. 16, p22, Jul. 2000.
3. Y. Hayashi et al., VLSI Tech. Dig., p122, 2000.
4. C. T. Swift et al., IEEE IEDM, p.927, 2002.