메뉴 건너뛰기




Volumn 67, Issue 10, 2000, Pages 889-891

Influence of bias potential on the optical properties of Nb 2O5 films obtained by magnetron sputtering

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; LIGHT ABSORPTION; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; REFRACTIVE INDEX;

EID: 0141615762     PISSN: 10709762     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOT.67.000889     Document Type: Article
Times cited : (5)

References (10)
  • 1
    • 0018806783 scopus 로고
    • Reactive d.c. sputtering with the magnetron-plasmatron for tantalum pentoxide and titanium dioxide films
    • S. Shiller, U. Heisig, K. Steinfelder, and L. Strumpfe, "Reactive d.c. sputtering with the magnetron-plasmatron for tantalum pentoxide and titanium dioxide films," Thin Solid Films 63, 360 (1979).
    • (1979) Thin Solid Films , vol.63 , pp. 360
    • Shiller, S.1    Heisig, U.2    Steinfelder, K.3    Strumpfe, L.4
  • 5
    • 0141606169 scopus 로고    scopus 로고
    • Automatic gas-pressure regulator in a vacuum chamber
    • O. D. Vol'pyan and P. P. Yakovlev, "Automatic gas-pressure regulator in a vacuum chamber," Opt. Zh. 64, No. 1, 79 (1997) [J. Opt. Technol. 64, 66 (1997)].
    • (1997) Opt. Zh. , vol.64 , Issue.1 , pp. 79
    • Vol'pyan, O.D.1    Yakovlev, P.P.2
  • 6
    • 0141606169 scopus 로고    scopus 로고
    • O. D. Vol'pyan and P. P. Yakovlev, "Automatic gas-pressure regulator in a vacuum chamber," Opt. Zh. 64, No. 1, 79 (1997) [J. Opt. Technol. 64, 66 (1997)].
    • (1997) J. Opt. Technol. , vol.64 , pp. 66
  • 9
    • 0020830645 scopus 로고
    • Determination of thin film coating material based on inverse synthesis
    • J. A. Dobrowolski, F. C. Ho, and A. Waldorf, "Determination of thin film coating material based on inverse synthesis," Appl. Opt. 22, 3191 (1981).
    • (1981) Appl. Opt. , vol.22 , pp. 3191
    • Dobrowolski, J.A.1    Ho, F.C.2    Waldorf, A.3
  • 10
    • 0025535053 scopus 로고
    • Structural optical and electrical properties of mixed dielectric films
    • R. Thielsch and W. Meiling, "Structural optical and electrical properties of mixed dielectric films," Vacuum 41, 1147 (1990).
    • (1990) Vacuum , vol.41 , pp. 1147
    • Thielsch, R.1    Meiling, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.