Scattered poetry as a practical in situ metrology technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5038 I, Issue , 2003, Pages 559-567

  Barouch, Eytan ^a   Knodle, Stephen L ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Inverse scattering; Scatterometry; Silicon material properties

Indexed keywords

ALGORITHMS; GRADIENT METHODS; INVERSE PROBLEMS; LIGHT MEASUREMENT; LIGHT SCATTERING; MATRIX ALGEBRA; SEMICONDUCTING SILICON;

HESSIAN MATRIX INVERSION; INVERSE SCATTERING ALGORITHM; SCATTEROMETRY;

PHOTOLITHOGRAPHY;

EID: 0141611985     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.488480     Document Type: Conference Paper

References (6)

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3. F. Pinto, "Engine cycle of an optically controlled vacuum energy transducer", Physical Review B, vol. 60, pp. 14740-14755, (1999)
4. M. S. Yeung and E. Barouch, "Three-dimensional mask transmission simulation using a single integral equation method", Proc. SPIE, vol. 3334, pp. 704-713 (1998).
5. D. Maystre, "Integral Methods", in Electromagnetic Theory of Gratings, R. Petit Ed. (Springer Verlag, 1980).
6. E. Barouch and S.L. Knodle, "Absorbing Lossy Boundary Layer Method", to be published in Journal of Scientific Computing, (2003)