Single-probe-beam differential amplitude and phase-scanning interferometer

Applied Optics

Volumn 36, Issue 25, 1997, Pages 6202-6210

  Suddendorf, Manfred B ^a,b   Somekh, Michael G ^a   See, Chung Wah ^a  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

^b GEC Marconi Materials Technology Ltd   (United Kingdom)

Author keywords

Differential phase measurement; Interferometry; Scanning optical profilometry; Stepheight measurement

Indexed keywords

EID: 0141543135     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.006202     Document Type: Article

References (14)

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